GaN Single Crystalline Substrates by Ammonothermal and HVPE Methods for Electronic Devices

Karolina Grabianska;Piotr Jaroszynski;Aneta Sidor;Michal Bockowski;Malgorzata Iwinska;Grabianska, Karolina;Jaroszynski, Piotr;Sidor, Aneta;Bockowski, Michal;Iwinska, Malgorzata;
Electronics 2020 Vol. 9 pp. 1342-
217
grabianska2020electronicsgan

Abstract

Recent results of GaN bulk growth performed in Poland are presented. Two technologies are described in detail: halide vapor phase epitaxy and basic ammonothermal. The processes and their results (crystals and substrates) are demonstrated. Some information about wafering procedures, thus, the way from as-grown crystal to an epi-ready wafer, are shown. Results of other groups in the world are briefly presented as the background for our work.

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111822
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10.3390/electronics9091342
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