Nano-opto-electro-mechanical switches operated at CMOS-level voltages.

Nano-opto-electro-mechanical switches operated at CMOS-level voltages.

Haffner, Christian;Joerg, Andreas;Doderer, Michael;Mayor, Felix;Chelladurai, Daniel;Fedoryshyn, Yuriy;Roman, Cosmin Ioan;Mazur, Mikael;Burla, Maurizio;Lezec, Henri J;Aksyuk, Vladimir A;Leuthold, Juerg;
science (new york, ny) 2019 Vol. 366 pp. 860-864
244
haffner2019nanooptoelectromechanicalscience

Abstract

Combining reprogrammable optical networks with complementary metal-oxide semiconductor (CMOS) electronics is expected to provide a platform for technological developments in on-chip integrated optoelectronics. We demonstrate how opto-electro-mechanical effects in micrometer-scale hybrid photonic-plasmonic structures enable light switching under CMOS voltages and low optical losses (0.1 decibel). Rapid (for example, tens of nanoseconds) switching is achieved by an electrostatic, nanometer-scale perturbation of a thin, and thus low-mass, gold membrane that forms an air-gap hybrid photonic-plasmonic waveguide. Confinement of the plasmonic portion of the light to the variable-height air gap yields a strong opto-electro-mechanical effect, while photonic confinement of the rest of the light minimizes optical losses. The demonstrated hybrid architecture provides a route to develop applications for CMOS-integrated, reprogrammable optical systems such as optical neural networks for deep learning.

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