This paper presents a new approach in the use of MEMS technology to fabricate micro-optofluidic polymer solid lenses in order to achieve the desired profile, focal length, numerical aperture, and spot size. The resulting polymer solid lenses can be applied in optical data storage systems, imaging systems, and automated optical inspection systems. In order to meet the various needs of different applications, polymer solid lenses may have a spherical or aspherical shape. The method of fabricating polymer solid lenses is different from methods used to fabricate tunable lenses with variable focal length or needing an external control system to change the lens geometry. The current trend in polymer solid lenses is toward the fabrication of microlenses with a high numerical aperture, small clear aperture (<2 mm), and high transmittance. In this paper we focus on the use of thermal energy and electrostatic force in shaping the lens profile, including both spherical and aspherical lenses. In addition, the paper discusses how to fabricate a lens with a high numerical aperture of 0.6 using MEMS and also compares the optical characteristics of polymer lens materials, including SU-8, Norland Optical Adhesive (NOA), and cyclic olefin copolymer (COC). Finally, new concepts and applications related to micro-optofluidic lenses and polymer materials are also discussed.