Transfer Printing Technology as a Straightforward Method to Fabricate Chemical Sensors Based on Tin Dioxide Nanowires
Abstract
Metal oxide multi-nanowire-based chemical gas sensors were manufactured by a fast and simple transfer printing technology. A two-step method employing spray pyrolysis deposition and a thermal annealing process was used for SnO nanowires fabrication. A polydimethylsiloxane stamp was used to transfer the SnO nanowires on two different gas sensing devices—Si-based substrates and microhotplate-based platform chips. Both contained a metallic inter-digital electrode structure (IDES), on which the SnO nanowires were transferred for realization of multi-NW gas sensor devices. The gas sensor devices show a very high response towards H S down to the 10 ppb range. Furthermore, a good response towards CO has been achieved, where in particular the microhotplate-based devices exhibit almost no cross sensitivity to humidity.
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microscopy
Medicine
Materials of engineering and construction. Mechanics of materials
Chemical technology
Engineering (General). Civil engineering (General)
Technology
Electrical engineering. Electronics. Nuclear engineering
Descriptive and experimental mechanics
Mechanical engineering and machinery
Science
physics
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