An integrated application of chemo-ultrasonic approach for improving surface finish of Si (100) using double disk magnetic abrasive finishing

An integrated application of chemo-ultrasonic approach for improving surface finish of Si (100) using double disk magnetic abrasive finishing

Pandey, K.
international journal of advanced manufacturing technology 2019 Vol. 103 pp. 3871-3886
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pandey2019aninternational

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