Micro-milling is an emerging processing technology for machining micro- and high-precision three dimensional parts that require the use of various materials (with sizes ranging from tens of micrometers to a few millimeters) in the field of advanced manufacturing. Therefore, it can be applied to manufacture the micro parts, but new challenges are raised about parts with high surface quality. Herein, both surface formation and micro machined surface roughness models are studied, with the aim of solving complicated problems regarding the quality of surface finish when micro-milling metallic materials. From a theoretical point of view, the first model for surface formation processes considering the strain gradient plasticity theory was built in the area around the cutting edge, and the minimum uncut chip thickness equation was derived. The model accounts for the properties of the work material in tertiary and quaternary zones on the minimum chip thickness. A second model for micro machined surface roughness based on the relationship of kinematics between cutting process and cutter edge was also developed, which takes the influences of tool run out into account. Both proposed models were introduced to analyze the tendency of surface roughness for micro grooves. Both models were also used to justify experimental results. The results show that the developed surface roughness model could be useful in predicting both roughness parameters and trends as a function of cutting parameters.