Chloride-based CVD growth of silicon carbide for electronic applications
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Chloride-based CVD growth of silicon carbide for electronic applications

Pedersen H;Leone S;Kordina O;Henry A;Nishizawa S;Koshka Y;Janzén E;;
chemical reviews 2012 Vol. 112 pp. -
148
h2012chemicalchloride-based

Abstract

Chloride-based CVD growth of silicon carbide for electronic applications

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National Center for Biotechnology Information NCBI NLM MEDLINE pubmed abstract nih national institutes of health national library of medicine pmid:22136412 doi:10.1021/cr200257z henrik pedersen stefano leone erik janzén

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