Low-temperature multichip-to-wafer 3D integration based on via-last TSV with OER-TEOS-CVD and microbump bonding without solder extrusion

Low-temperature multichip-to-wafer 3D integration based on via-last TSV with OER-TEOS-CVD and microbump bonding without solder extrusion

Kumahara, K.
proceedings - electronic components and technology conference 2020 Vol. 2020-June pp. 1199-1204
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kumahara2020lowtemperatureproceedings

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263897
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10.1109/ECTC32862.2020.00192
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