In circular colliders, as well as in damping rings and synchrotron radiation light sources, beam halo is one of the critical issues limiting the performance as well as potentially causing component damage and activation. It is imperative to clearly understand the mechanisms that lead to halo formation and to test the available theoretical models. Elastic beam-gas scattering can drive particles to large oscillation amplitudes and be a potential source of beam halo. In this paper, numerical estimation and Monte Carlo simulations of this process at the ATF of KEK are presented. Experimental measurements of beam halo in the ATF2 beam line using a diamond sensor detector are also described, which clearly demonstrate the influence of the beam-gas scattering process on the transverse halo distribution.