The fabrication of compliant mechanisms on the mesoscale requires collaboration of mechanical engineering design, with materials science and engineering fabrication approaches. In this paper, a review of current fabrication approaches to produce mesoscale devices is given, highlighting the benefits and limitations of each technique. Additionally, a hierarchy is provided, eliminating fabrication techniques that do not completely satisfy the mechanical design requirements of the compliant mechanisms. Furthermore, the lost mold-rapid infiltration forming process (LM-RIF) is described, and compared to existing fabrication approaches. Finally, prototype mesoscale compliant mechanisms are fabricated, demonstrating the versatility of the LM-RIF process to produce both metal and ceramic devices, as well as ability of a fabrication process to work in collaboration with mechanical design.