Industrial robots are used for automatic drilling and riveting. The absolute position accuracy of an industrial robot is one of the key performance indexes in aircraft assembly, and can be improved through error compensation to meet aircraft assembly requirements. The achievable accuracy and the difficulty of accuracy compensation implementation are closely related to the choice of sampling points. Therefore, based on the error similarity error compensation method, a method for choosing sampling points on a uniform grid is proposed. A simulation is conducted to analyze the influence of the sample point locations on error compensation. In addition, the grid steps of the sampling points are optimized using a statistical analysis method. The method is used to generate grids and optimize the grid steps of a Kuka KR-210 robot. The experimental results show that the method for planning sampling data can be used to effectively optimize the sampling grid. After error compensation, the position accuracy of the robot meets the position accuracy requirements.