a simple fabrication process based on micro-masonry for the realization of nanoplate resonators with integrated actuation and detection schemes

a simple fabrication process based on micro-masonry for the realization of nanoplate resonators with integrated actuation and detection schemes

;Liviu eNicu;Liviu eNicu;Thierry eLeichle;Thierry eLeichle;Seok eKim;Bernard eLegrand;Bernard eLegrand;Fabrice eMathieu;Fabrice eMathieu;Hohyun eKeum;Adhitya eBhaswara;Adhitya eBhaswara
bmc genetics 2016 Vol. 2 pp. -
149
enicu2016frontiersa

Abstract

In this work, we use the micro-masonry technique to fabricate nanoplate resonators with integrated electrostatic actuation and capacitive detection in a few steps. Our approach is an alternative solution to the current fabrication methods used to create membranes and plates that usually rely on the selective etching of a sacrificial layer. Highly doped silicon plates were transfer-printed using microtip elastomeric stamps onto insulated bases displaying cavities in order to form suspended structures with airtight gaps. By post-processing adequate interconnections, the fabricated resonators were actuated and their resonant frequency measured in a fully integrated manner. The tested nanoplate devices behave as predicted by theory and offer quality factors of more than 30 in air. Because the cavities used for electrostatic actuation/sensing of the devices are tight sealed, nanoplates fabricated via micro-masonry are suitable for liquid environment operation and are thus a promising solution for biosensing applications.

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0x95644003c57E6F55A65596E3D9Eac6813e3566dA
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