micro-shaping of nanopatterned surfaces by electron beam irradiation

micro-shaping of nanopatterned surfaces by electron beam irradiation

;Carlos Angulo Barrios;Víctor Canalejas-Tejero
chemistryopen 2016 Vol. 7 pp. 66-
121
barrios2016micromachinesmicro-shaping

Abstract

We show that planar nanopatterned thin films on standard polycarbonate (PC) compact discs (CD) can be micro-shaped in a non-contact manner via direct e-beam exposure. The shape of the film can be controlled by proper selection of the e-beam parameters. As an example of application, we demonstrate a two-dimensional (2D) array of micro-lenses/reservoirs conformally covered by an Al 2D nanohole array (NHA) film on a PC CD substrate. It is also shown that such a curvilinear Al NHA layer can be easily transferred onto a flexible polymeric support. The presented technique provides a new tool for creating lab-on-CD architectures and developing multifunctional (flexible) non-planar nanostructured films and surfaces.

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199093
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10.3390/mi7040066
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