Modern methods of measurement developed on the basis of advanced reflectorless distance measurement have paved the way for easier detection and analysis of shift and deformation. A large quantity of collected data points will often require a mathematical model of the surface that fits best into these. Although this can be a complex task, in the case of planar surfaces it is easily done, enabling further processing and analysis of measurement results. The paper describes the fitting of a plane to a set of collected points using the least squares distance, with previously excluded outliers via the RANSAC algorithm. Based on that, a method for analysis of the deformation and shift of planar surfaces is also described.