numerical modelling of the czochralski growth of β-ga2o3

numerical modelling of the czochralski growth of β-ga2o3

;Wolfram Miller;Klaus Böttcher;Zbigniew Galazka;Jürgen Schreuer
turk kardiyoloji dernegi arsivi 2017 Vol. 7 pp. 26-
162
miller2017crystalsnumerical

Abstract

Our numerical modelling of the Czochralski growth of single crystalline β-Ga 2 O 3 crystals (monoclinic symmetry) starts at the 2D heat transport analysis within the crystal growth furnace, proceeds with the 3D heat transport and fluid flow analysis in the crystal-melt-crucible arrangement and targets the 3D thermal stress analysis within the β-Ga 2 O 3 crystal. In order to perform the stress analysis, we measured the thermal expansion coefficients and the elastic stiffness coefficients in two samples of a β-Ga 2 O 3 crystal grown at IKZ. Additionally, we analyse published data of β-Ga 2 O 3 material properties and use data from literature for comparative calculations. The computations were performed by the software packages CrysMAS, CGsim, Ansys-cfx and comsol Multiphysics. By the hand of two different thermal expansion data sets and two different crystal orientations, we analyse the elastic stresses in terms of the von-Mises stress.

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ID: 189273
Ref Key: miller2017crystalsnumerical
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189273
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10.3390/cryst7010026
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