We use a nonlinear finite element (FE) method model to compare,optimize and determine the limits for useful geometries of microfluidicvalves in elastomer polydimethylsiloxane (PDMS). Simulations havebeen performed with the aim of finding the optimal shape, size andlocation of pressurization that minimizes the pressure required to operatethe valve. One important constraint governing the design parameters isthat the stresses should be within elastic limits, so that the componentremains safe from any type of structural failure. To obtain reliable results,non-linear stress analysis was performed using the Mooney-Rivlin 9parameter approximation which is based on the Hyper Elastic MaterialModel. A 20 noded brick element was used for the development of FEmodel. Mesh sensitivity analysis was also performed to assess the qualityof the results. The simulations were performed with commerciallyavailable FE modeling software, developed by ANSYS Inc. to determinethe effect of varying different geometric parameters on the performanceof micro-fluidic valves.The aim of this work is to determine the geometry of the channel crosssectionthat would result in the largest deflection for the least appliedpressure, i.e. to minimize the pressure needed to operate the valve.