control of bouncing in mems switches using double electrodes

control of bouncing in mems switches using double electrodes

;Farhan Abdul Rahim;Mohammad I. Younis
journal of power sources 2016 Vol. 2016 pp. -
163
rahim2016mathematicalcontrol

Abstract

This paper presents a novel way of controlling the bouncing phenomenon commonly present in the Radio Frequency Microelectromechanical Systems (RF MEMS) switches using a double-electrode configuration. The paper discusses modeling bouncing using both lumped parameter and beam models. The simulations of bouncing and its control are discussed. Comparison between the new proposed method and other available control techniques is also made. The Galerkin method is applied on the beam model accounting for the nonlinear electrostatic force, squeeze film damping, and surface contact effect. The results indicate that it is possible to reduce bouncing and hence beam degradation, by the use of double electrodes.

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0x95644003c57E6F55A65596E3D9Eac6813e3566dA
Article ID:
162020
Unique Identifier:
10.1155/2016/3479752
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