A novel micro extra deep drawing process with ultrahigh fluid pressure and press motion controls are developed. A space between the blank and 1st punch is made by the press motion at the 2nd drawing stage and the ultrahigh pressure is applied so as to be disappeared this space. It can enhance a material flow into the die cavity because the ultrahigh pressure acts on the blank at side wall. In addition, a friction holding effect occurs, which prevents the thickness reduction at punch shoulder and side wall. Due to these mechanisms, the micro cup with aspect ratio of 2.0 can be successfully fabricated by micro extra deep drawing in FE simulation, although it cannot be fabricated by conventional micro deep drawing and micro hydromechanical deep drawing.