This paper analyses the movement of piezoelectric actuator. The goal of this work was to create an algorithm for trajectory planning of piezorobot, create a system for trajectory control, develop software and verify the functioning of the algorithm in practice. Movements of piezorobot are very small and very frequent therefore it is difficult to measure trajectories using standard equipment. Design of a novel measurement system and trajectory adjustment was created in this paper. An experimental system for control and trajectory movement tracking of piezorobot was developed. It consists of cylindrical piezorobot, control signal forming and image processing system for trajectory tracking. The cylindrical piezorobot moves in specific trajectories on the plane and is controlled with sinusoidal signals. They are generated by trajectory forming and control software using MATLAB and LabVIEW. The control signals are monitored using a system with oscilloscope. The trajectory of piezorobot was monitored and measured using video camera and video processing software developed by LabVIEW. The software contains image processing and object path tracking, and is implemented using LabVEW and MATLAB. Experimental results showed that trajectories forming algorithm and developed control software is suitable for controlling robots moving on plane.