Transient Radar Method (TRM) was recently proposed as a novel contact-free method for the characterization of multilayer dielectric structures including the geometric details. In this paper, we discuss and quantify the intrinsic and systematic errors of TRM. Also, solutions for mitigating these problems are elaborated extensively. The proposed solution for error correction will be applied to quantify experimentally the thickness of several single-layer dielectric structures with thicknesses varying from larger to smaller than the wavelength. We will show how the error correction method allows sub-wavelength thickness measurements around $\lambda /5$ .