Influence of the Plasma Regime on the Structural, Optical, Electrical and Morphological Properties of a-Si:H Thin Films
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Influence of the Plasma Regime on the Structural, Optical, Electrical and Morphological Properties of a-Si:H Thin Films

Hugo Águas,Rodrigo Martins,Yuri Nunes,Manuel J.P. Maneira,Elvira Fortunato;Hugo Águas;Rodrigo Martins;Yuri Nunes;Manuel J.P. Maneira;Elvira Fortunato;
materials science forum 2001 Vol. 382 pp. 11-20
219
fortunato2001materialsinfluence

Keywords

thin films optical plasma regime morphological properties

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DOI:
10.4028/www.scientific.net/msf.382.11
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https://sciprofiles.com/publication/view/da6a015c3...

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Ref Key: fortunato2001materialsinfluence
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