Interface Effect on the Transverse Thermal Conductivity of SiO2 Films Deposited on Silicon
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Interface Effect on the Transverse Thermal Conductivity of SiO2 Films Deposited on Silicon

W. Zhao;F. R. Brotzen;L. Hehn;P. J. Loos;
mrs online proceedings library archive 2011 Vol. 516 pp. -
168
zhao2011mrsinterface

Abstract

Interface Effect on the Transverse Thermal Conductivity of SiO2 Films Deposited on Silicon - Volume 516 - W. Zhao, F. R. Brotzen, L. Hehn, P. J. Loos

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DOI:
doi:10.1557/PROC-516-51
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https://doi.org/10.1557/proc-516-51

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