Influence of O2 partial pressure on the growth of nanostructured anatase phase TiO2 thin films prepared by DC reactive magnetron sputtering

Susana Sério,M. E. Melo Jorge,Manuel J.P. Maneira,Yuri Nunes;Susana Sério;M. E. Melo Jorge;Manuel J.P. Maneira;Yuri Nunes;

materials chemistry and physics 2011 Vol. 126 pp. 73-81

194

nunes2011materialsinfluence

a. nanostructures a. thin films b. sputtering d. optical properties

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116187

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10.1016/j.matchemphys.2010.12.008

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