Interface Effect on the Transverse Thermal Conductivity of SiO2 Films Deposited on Silicon

Interface Effect on the Transverse Thermal Conductivity of SiO2 Films Deposited on Silicon

W. Zhao,F. R. Brotzen,L. Hehn,P. J. Loos;W. Zhao;F. R. Brotzen;L. Hehn;P. J. Loos;
mrs proceedings 1998 Vol. 516 pp. 1-
231
loos1998mrsinterface

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