Polycrystalline silicon field emitter arrays by silicidation-sharpening technique at low temperature

Jin Ho Lee;Jin Ho Lee;

journal of vacuum science & technology b: microelectronics and nanometer structures 1998 Vol. 16 pp. 773-

160

lee1998journalpolycrystalline

polycrystalline silicon low temperature emitter arrays silicon field silicidation sharpening

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115151

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