Influence of the Plasma Regime on the Structural, Optical, Electrical and Morphological Properties of a-Si:H Thin Films

Águas, Hugo;Martins, Rodrigo;Nunes, Yuri;Maneira, Manuel J.P.;Fortunato, Elvira;

materials science forum 2001 Vol. 382 pp. 11-20

134

hugo2001materialsinfluence

Material ion bombardment langmuir probe plasma process regimes

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