Fabrication and characterization of silicon field emitter arrays with focusing electrode by the chemical mechanical polishing process

Jin Ho Lee;Jin Ho Lee;

journal of vacuum science & technology b: microelectronics and nanometer structures 1998 Vol. 16 pp. 811-

168

lee1998journalfabrication

polishing process focusing electrode emitter arrays silicon field mechanical polishing field emitter chemical mechanical

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111967

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10.1116/1.589911

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Scimatic Chain (ID: 481)

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