Thin-film thickness absolute measurement by differential optic-fiber white light interferometry

Thin-film thickness absolute measurement by differential optic-fiber white light interferometry

Lu, X.
conference record - ieee instrumentation and measurement technology conference 2019 Vol. 2019-May pp. 0-0
193
lu2019thinfilmconference

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102817
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10.1109/I2MTC.2019.8826878
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