Keyword Connections

microelectromechanical systems

Journals

0

No Journal Connected

Research Groups

0

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Bibliographies

3

1 Microfluidic Synthesis, Control, and Sensing of Magnetic Nanoparticles: A Review

2 Simulation of SiO<inf>2</inf> and Si feature etching for microelectronics and microelectromechanical systems fabrication: A combined simulator coupling modules of surface etching, local flux calculation, and profile evolution

3 optimization of the gaas-on-si substrate for microelectromechanical systems (mems) sensor application