Bonding of silicon scanning mirror having vertical comb fingers

Jin-Ho Lee,Young-Chul Ko,Byoung-So Choi,Jong-Min Kim,Duk Young Jeon;Jin-Ho Lee;Young-Chul Ko;Byoung-So Choi;Jong-Min Kim;Duk Young Jeon;

journal of micromechanics and microengineering 2002 Vol. 12 pp. 644-649

166

jeon2002journalbonding

bonding vertical comb silicon scanning scanning mirror comb fingers

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273435

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10.1088/0960-1317/12/5/320

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