The circular economy pattern is the key to solve the contradiction between industrial development and resource protection. Based on the principle of the "3Rs" of the circular economy (reduction, reuse, and resource utilization), and combined with the characteristics of industrial and provincial circular economy development from the perspective of material flow analysis, this study constructs an evaluation index system of industrial circular economy in China's provinces. A combination of the global entropy and the coefficient of variation methods is used to calculate the comprehensive index of industrial circular economy development. Furthermore, this study analyzes the development of China's provincial industrial circular economy from the two dimensions of time and space. The results show that China's industrial circular economy developed rapidly during the Eleventh and Twelfth Five-Year Plan periods. Resource output, resource consumption, and resource reuse and waste disposal have improved over time, but the outlook for emissions of major pollutants is not optimistic. China's industrial circular economy has significant spatial correlation and obvious regional differences, since the development of the circular economy requires a large amount of capital input, and the capacity of capital input fundamentally depends on the regional economic situation. Therefore, the spatial agglomeration pattern of China's industrial circular economy is roughly the same as that of China's economic development. Eastern China has the fastest development, followed by the central and northeast regions, while the western region, especially the northwest, lags the other regions.