journal of vacuum science and technology a: vacuum, surfaces and films

journal of vacuum science and technology a: vacuum, surfaces and films

Indexed In	scopus
Short Name	journal of vacuum science and technology a: vacuum, surfaces and films
Abbreviated Name	journal of vacuum science and technology a: vacuum, surfaces and films
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2019 Dark current-voltage characteristics of vacuum deposited multilayer amorphous selenium-alloy detectors and the effect of x-ray irradiation Clicks: 219

2004 Simulation of SiO<inf>2</inf> and Si feature etching for microelectronics and microelectromechanical systems fabrication: A combined simulator coupling modules of surface etching, local flux calculation, and profile evolution Clicks: 198