Fabrication and characterization of SiO 2 microcantilevers by direct laser writing and wet chemical etching methods for relative humidity sensing

Fabrication and characterization of SiO 2 microcantilevers by direct laser writing and wet chemical etching methods for relative humidity sensing

Balasubramanian, S.
microelectronic engineering 2019 Vol. 212 pp. 61-69
202
balasubramanian2019fabricationmicroelectronic

Citation

ID: 77870
Ref Key: balasubramanian2019fabricationmicroelectronic
Use this key to autocite in SciMatic or Thesis Manager

References

Blockchain Verification

Account:
NFT Contract Address:
0x95644003c57E6F55A65596E3D9Eac6813e3566dA
Article ID:
77870
Unique Identifier:
10.1016/j.mee.2019.04.005
Network:
Scimatic Chain (ID: 481)
Loading...
Blockchain Readiness Checklist
Authors
Abstract
Journal Name
Year
Title
4/5
Blockchain Upload Locked

Complete all 5 checklist items to tokenize your article

Saymatik Web3.0 Wallet