Single mask fabrication process of vacuum microelectronics components and preliminary characterization results

Phommahaxay, A.

technical digest of the 18th international vacuum nanoelectronics conference, ivnc 2005 2005 Vol. 2005 pp. 368-369

188

phommahaxay2005singletechnical

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ID: 66535

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66535

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10.1109/IVNC.2005.1619639

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Scimatic Chain (ID: 481)

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