IEEE transactions on ultrasonics, ferroelectrics, and frequency control2019
217
lu2019ghzieee
Abstract
We present the first group of GHz broadband SH0 mode acoustic delay lines. The implemented acoustic delay lines adopt unidirectional transducer designs in a suspended X-cut lithium niobate thin film. The design space of the SH0 mode acoustic delay lines at GHz is first theoretically investigated, showing that the large coupling and sufficient spectral clearance to adjacent modes collectively enable the broadband performance of SH0 delay lines. The fabricated devices show 3-dB fractional bandwidth ranging from 4% to 34.3%, insertion loss between 3.4 dB and 11.3 dB. Multiple delay lines have been demonstrated with center frequencies from 0.7 GHz to 1.2 GHz, showing great frequency scalability. The propagation characteristics of SH0 in lithium niobate thin film are experimentally extracted. The demonstrated acoustic delay lines can potentially facilitate broadband signal processing applications.