Profile control of femtosecond laser-fabricated moth-eye structures on Si substrate

Profile control of femtosecond laser-fabricated moth-eye structures on Si substrate

Xi Yu;Yuki Yasunaga;Kazusa Goto;Dejun Liu;Shingo Ono;
optics and lasers in engineering 2021 Vol. 142 pp. 106584-
100
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Abstract

Request PDF | Profile control of femtosecond laser-fabricated moth-eye structures on Si substrate | The present study focuses on controlling the antireflective (AR) characteristics of one-dimensional moth eye structures on a high-resistivity... | Find, read and cite all the research you need on ResearchGate

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