Profile control of femtosecond laser-fabricated moth-eye structures on Si substrate
Xi Yu;Yuki Yasunaga;Kazusa Goto;Dejun Liu;Shingo Ono;
optics and lasers in engineering2021Vol. 142pp. 106584-
100
yu2021opticsprofile
Abstract
Request PDF | Profile control of femtosecond laser-fabricated moth-eye structures on Si substrate | The present study focuses on controlling the antireflective (AR) characteristics of one-dimensional moth eye structures on a high-resistivity... | Find, read and cite all the research you need on ResearchGate