A novel process for plasma immersion ion implantation and deposition with ions from vaporization of solid targets

Rogerio Oliveira,M. Ueda,B. Moreno,L. Hoshida,S. Oswald,E. Abramof;Rogerio Oliveira;M. Ueda;B. Moreno;L. Hoshida;S. Oswald;E. Abramof;

81

abramof2008physicaa

52.77.dq 61.05.cp 68.55.−a 78.30.er 82.80.pv

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269215

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10.1002/pssc.200778307

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Scimatic Chain (ID: 481)

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