Inner Spacer Engineering to Improve Mechanical Stability in Channel-Release Process of Nanosheet FETs
Abstract
Mechanical stress is demonstrated in the fabrication process of nanosheet FETs. In particular, unwanted mechanical instability stemming from gravity during channel-release is covered in detail by aid of 3-D simulations. The simulation results show the physical weakness of suspended nanosheets and the impact of nanosheet thickness. Inner spacer engineering based on geometry and elastic property are suggested for better mechanical stability. The formation of wide contact area between inner spacer and nanosheet, as well as applying rigid spacer dielectric material, are preferred.
Access
Citation
ID:
266025
References
Blockchain Verification
Account:
NFT Contract Address:
0x95644003c57E6F55A65596E3D9Eac6813e3566dA
Article ID:
266025
Unique Identifier:
10.3390/electronics10121395
Network:
Scimatic Chain (ID: 481)
Loading...
Blockchain Readiness Checklist
Authors
Abstract
Journal Name
Year
Title
Creates 1,000,000 NFT tokens for this article
Token Features:
- ERC-1155 Standard NFT
- 1 Million Supply per Article
- Transferable via MetaMask
- Permanent Blockchain Record
Scan with Saymatik Web3.0 Wallet