TEOS-based low-pressure chemical vapor deposition for gate oxides in 4H–SiC MOSFETs using nitric oxide post-deposition annealing

TEOS-based low-pressure chemical vapor deposition for gate oxides in 4H–SiC MOSFETs using nitric oxide post-deposition annealing

Moon, J.H.
current applied physics 2020 Vol. 20 pp. 1386-1390
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moon2020teosbasedcurrent

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263885
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10.1016/j.cap.2020.09.003
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