Lowering the energy required by base stations (BSs) is one of the hot issues nowadays in order to achieve green cellular networks. The energy consumption of femto BSs can be reduced, by turning off the radio interface when there is no mobile station (MS) under the coverage area of the femto BSs or MSs served by the femto BSs do not transmit or receive data packets for a long time, especially late at night. In the energy-efficient femto BSs, if MSs have any data packet to transmit and the radio interface of femto BSs is in the off state, MSs wake up the radio interface of femto BSs by using an additional low-power radio interface. In this paper, active (data), idle, active (signaling), sleep entering, sleep and waking up states are defined for the state model for the energy-efficient femto BSs, and the state transitions are modeled analytically. The steady-state probability of each state is derived thoroughly using a semi-Markov approach. Then, the performance of the energy-efficient femto BSs is analyzed in detail, from the aspects of energy consumption, cumulative average delay, cost and low-power radio signaling load. From the results, the tradeoff relationship between energy consumption and cumulative average delay is analyzed in detail, and it was concluded that an appropriate inactivity timer value should be selected to balance the tradeoff.