In measurement science and engineering, the method of compensation plays a decisive role and is widely used in practical applications, in particular for sensors and measurement systems, where high accuracy is required. However, a general theoretical system description of this method with particular respect to figures of merit in sensor technology does not exist yet. Nevertheless, this is important for a real understanding of the system's structure and its properties and would facilitate prospective sensor design. Within this work, we provide a general system-based description and comparison of both the compensation and the deflection method. Based on a general sensor model and selected transfer functions, which cover most sensor types, important sensor properties like static deviations in sensitivity, long-term drift effects, response time, output signal characteristics as well as nonlinearities and hysteresis are studied in a systematic fashion for both measurement methods. In the case of a compensation method, the core sensor element is part of a controlled closed-loop system, leading to different system properties compared to an open-loop sensor operated in deflection method. The influence of linear standard controllers, which are widely used in industrial measurement and control systems, is studied with respect to the sensor properties. In the conclusions we will summarize which controller type is appropriate for the attainment of a specifically targeted sensor behavior.