Planar magnetron glow discharge on copper: Empirical and semiempirical relations

M. L. Escrivão,A. M. C. Moutinho,M. J. P. Maneira;M. L. Escrivão;A. M. C. Moutinho;M. J. P. Maneira;

journal of vacuum science & technology a 1994 Vol. 12 pp. 723-726

164

maneira1994journalplanar

copper planar magnetron semiempirical magnetron glow discharge

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117200

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