The objective of this study was to compare the inactivation efficacy of saturated steam (SS) and superheated steam (SHS) on biofilms on food contact surfaces, including type 304 stainless steel coupons with No. 4 finish (STS No. 4), type 304 stainless steel coupons with 2B finish (STS 2B), high-density polyethylene (HDPE), and polypropylene (PP). In addition, the effects of the surface characteristics on the inactivation efficacy were evaluated. Biofilms were formed on each food contact coupon surface using a three-strain cocktail of . Five-day-old biofilms on STS No. 4, STS 2B, HDPE, and PP coupons were treated with SS at 100°C and SHS at 125 and 150°C for 2, 4, 7, 10, 15, and 20 s. Among all coupon types, SHS was more effective than SS in inactivating the biofilms. biofilms on steel coupons were more susceptible to most SS and SHS treatments than the biofilms on plastic coupons. biofilms on HDPE and PP coupons were reduced by 4.00 and 5.22 log CFU per coupon, respectively, after SS treatment (100°C) for 20 s. SS treatment for 20 s reduced the amount of biofilm on STS No. 4 and STS 2B coupons to below the detection limit. With SHS treatment (150°C), biofilms on HDPE and PP needed 15 s to be inactivated to below the detection limit, while steel coupons only needed 10 s. The results of this study suggest that SHS treatment has potential as a biofilm control intervention for the food industry.